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Mr. Stephen Roux


sroux@fairfield.edu
p: x4147

 

Society of Photo-optical Instrumentation Engineers,  Micro/Nano Lithography & Fabrication,  Progress report: Engineers take the EUV lithography challenge.  By Noreen Harned, Steve Roux, Phil Ware, and Akikazu Tanimoto.  From OE magazine February 2003.  31 February 2003, SPIE Newsroom. DOI: 10.1117/2.5200302.0003

Plenary talk on application of robotics in modern Lithogaphy Tools.  2009 IEEE TePRA. International Conference on Technologies for Practical Robot Applications, November 9-10, 2009,  Woburn, Massachusetts.

Named as Inventor or Co-Inventor on 30 US and numerous Foreign Patents