Mr. Stephen Roux |
p: x4147 |
Society of Photo-optical Instrumentation Engineers, Micro/Nano Lithography & Fabrication, Progress report: Engineers take the EUV lithography challenge. By Noreen Harned, Steve Roux, Phil Ware, and Akikazu Tanimoto. From OE magazine February 2003. 31 February 2003, SPIE Newsroom. DOI: 10.1117/2.5200302.0003
Plenary talk on application of robotics in modern Lithogaphy Tools. 2009 IEEE TePRA. International Conference on Technologies for Practical Robot Applications, November 9-10, 2009, Woburn, Massachusetts.
Named as Inventor or Co-Inventor on 30 US and numerous Foreign Patents